| 摘要 |
PROBLEM TO BE SOLVED: To easily provide a required laser energy for properly blowing a fuse without being affected by the remaining film pressure of a wafer. SOLUTION: An observation fuse and a logical circuit which outputs a signal representing continuity or cut state of the observation fuse are provided in a vacant region of a wafer forming a semiconductor circuit. The energy of laser is changed to blow the observation fuse and an expected value is taken out through an external terminal at disconnection, so the projected level of laser that cuts the observation fuse is easily known without delay. Thus, a required laser energy for properly blowing the fuse is known without being affected by the remaining film pressure of the wafer.
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