发明名称 PHASE CHANGE TYPE OPTICAL DISK MEDIUM AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a phase change type optical disk medium where information of already recorded adjacent tracks is not damaged regardless of execution of land/ groove recording and the cross erase characteristic is excellent by using a substrate having a narrow track pitch and to provide a method for manufacturing the phase change type optical disk medium. SOLUTION: Recording layers 3 laminated at a land part (recessed part) and a groove part (projecting part) adjacent to each other on a substrate 1 made of quartz are discontinuously formed. For the purpose of that, a lower dielectric material layer 2, the recording layer 3, an upper dielectric material layer 4, a reflection film layer 5 and a protective dielectric material layer 6 are successively formed on the substrate 1 having a flat surface. Moreover, a photoresist pattern having T-shaped sectional plane is formed with lower and upper layer resist and ion etching of a thickness equal to the thickness of the laminated body of the lower dielectric material layer 2-the protective dielectric material layer 6 is performed onto the substrate 1. In this state, thin films similar to the lower dielectric material layer 2-the protective dielectric material layer 6 are laminated and the total part of the upper side from the lower resist is removed.
申请公布号 JP2001266405(A) 申请公布日期 2001.09.28
申请号 JP20000074781 申请日期 2000.03.16
申请人 NEC CORP 发明人 KARIYADA HIDETSUGU
分类号 G11B7/24;G11B7/26 主分类号 G11B7/24
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