| 摘要 |
PROBLEM TO BE SOLVED: To remove a pseudo defect due to the error of reference picture data and to highly precisely detect a micro defect. SOLUTION: At the time of comparing sensor picture data obtained by image- picking up a mask 6 by a sensor 4 with reference picture data and detecting the defect of a mask pattern formed on the mask 6, a data identification part 11 identifies an error occurred in reference picture data by using highly precise reference picture data generated by a highly precise reference picture generation part 9. A correction registration part 12 corrects/registers the result of the defect detection of the mask pattern based on the identification result. |
