SUBLIMATION PURIFYING METHOD AND APPARATUS

摘要

A sublimation purifying method and an apparatus used therefor for producing sublimation purified product with high purity and high yield while preventing the apparatus from being corroded and the product from being contaminated and spoiling. The sublimation purifying apparatus has a heating unit made of a material generating heat by electromagnetic induction, a sublimating unit (A) the temperature of which can be controlled independently by electromagnetic induction heating, and collecting units (B, C) the temperature of which can be also controlled independently by electromagnetic induction heating. The material of the inner surface of the sublimation or collecting units coming into contact with a sublimating material or the material of the inner tube in the sublimation or collecting units is a metal or ceramic inactive to the sublimating material. The sublimating purifying method comprises the steps of putting a sublimating material in a sublimating unit of such a sublimation purifying apparatus, heating the sublimating unit by electromagnetic induction heating so as to sublimate the sublimating material, introducing the gas in a collecting unit (B) having a zone the temperature of which is regulated by electromagnetic induction heating so as to collect the object sublimated material.