| 摘要 |
<p>Circuit wiring is inspected visually. An inspection system (20) comprises a sensor chip (1) equipped with a plurality of sensor elements, a computer (21), probes (22) for supplying a test signal to circuit wiring (101), and a selector (23) for changing the paths of the test signal to the probes (22). The computer (21) receives the signal detected by the sensor chip (1) and generates image data, and a display (21a) displays the image of the circuit wiring of interest. This allows the shape of a particular circuit wiring to be found. Any defect of the circuit wiring (101), such as a discontinuity and a short circuit, can also be detected using the obtained image data and the image data indicative of the designed circuit wiring.</p> |
