发明名称 |
Bar-type field effect transistor (FET) used in electronic devices comprises a bar formed on a substrate, and a gate and a spacer formed over part of the bar |
摘要 |
Bar-type field effect transistor comprises a bar (103) formed on a substrate (101); and a gate (104) and a spacer (107, 108) formed over part of the bar. An Independent claim is also included for a process for the production of the bar-type field effect transistor comprising: (a) forming a bar on the substrate; (b) forming a gate layer over the substrate and over a part of the bar; (c) forming an insulating layer over the gate layer; (d) partially removing the gate layer below the insulating layer; and (e) forming a spacer below the insulating layer.
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申请公布号 |
DE10012112(A1) |
申请公布日期 |
2001.09.27 |
申请号 |
DE20001012112 |
申请日期 |
2000.03.13 |
申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
HOFMANN, FRANZ;ROESNER, WOLFGANG;LUYKEN, HANNES |
分类号 |
H01L21/336;H01L29/423;H01L29/786;(IPC1-7):H01L29/78 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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