Linear motor drive uses air-bearings for supporting mobile unit provided by slide and mobile linear motor element from guide body and/or stationary motor element

摘要

The linear motor drive has a stationary guide body (2') and a relatively displaced slide (3), with at least one linear motor (8,9) positioned symmetrically relative to the displacement path. The linear motor has a stationary motor element and a mobile motor element connected to the slide, with the mobile unit provided by the slide and the mobile motor element supported by air-bearings (12,14,16,18) from the guide body and/or the stationary motor element. The effective centre of gravity of the driving forces of the linear motor coincides with the centre of gravity of the mobile unit.