| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that stop position deviation is generated due to fine vibration generated in a mover temporarily stopping after completing coarse driving even fine driving is performed afterwards. SOLUTION: This positioning device 30 is provided with a vibration motor 33 having a vibrator 31, a mover 32, an encoder 59, and a driving controller 61 for inputting a first driving signal to the vibrator 31 when the moving distance of the mover 32 to a target stop position is greater than a preliminarily decided prescribed value and for inputting a second driving signal to the vibrator 31 when the moving distance is equal to or smaller than the prescribed value and for inputting the second driving signal on the basis of the detected value of the encoder 59 after the lapse of a prescribed time since the input of the first driving signal is stopped and a mobile stage 34 to be driven by a vibration motor 33. |
