发明名称 |
Method for manufacturing a thin-layer component, in particular a thin-layer high-pressure sensor |
摘要 |
A manufacturing method for a thin-layer component, in particular a thin-layer high-pressure sensor, having a substrate on which the at least one functional layer to be patterned is to be deposited in the steps, preparing the substrate; depositing the functional layer on the substrate; and patterning the functional layer via a laser processing step, the laser processing step being selective with respect to the substrate.
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申请公布号 |
US2001024865(A1) |
申请公布日期 |
2001.09.27 |
申请号 |
US20010816997 |
申请日期 |
2001.03.23 |
申请人 |
KRETSCHMANN ANDR?EACUTE,;HENN RALF;WINGSCH VOLKER |
发明人 |
KRETSCHMANN ANDR?EACUTE,;HENN RALF;WINGSCH VOLKER |
分类号 |
G01L9/04;B23K26/00;B23K26/06;B81B3/00;G01L9/00;H01L29/84;(IPC1-7):H01L21/20 |
主分类号 |
G01L9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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