发明名称 |
Non-destructive measurement of thin layers, involves sequentially exciting coil and transmitting signals of coils to evaluation circuit to determine layer thickness |
摘要 |
First and second coils are provided on a probe. The signals of the coil are transmitted to an evaluation circuit. The first and second coil devices are sequentially excited by an exciter circuit during measurement. The signal output by each coil device is then evaluated to determine the layer thickness.
|
申请公布号 |
DE10014348(A1) |
申请公布日期 |
2001.09.27 |
申请号 |
DE20001014348 |
申请日期 |
2000.03.24 |
申请人 |
HELMUT FISCHER GMBH & CO INSTITUT FUER ELEKTRONIK UND MESTECHNIK |
发明人 |
|
分类号 |
G01B7/06;G01B7/00;G21C17/003;(IPC1-7):G01B7/06 |
主分类号 |
G01B7/06 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|