SURFACE ACOUSTIC WAVE ELEMENT

摘要

A surface acoustic wave element suitable for mass-production, and excellent in operation characteristics in a high frequency region, the element comprising a diamond layer (3), a tz-thick ZnO layer (4) formed on the diamond layer (3), interdigital electrodes (5) formed on the ZnO layer (4), for exciting and receiving a surface acoustic wave, and a tS-thick SiO2 layer (6) covering th e interdigital electrodes (5) and formed on the ZnO layer (4), wherein kh1 and kh2 given by kh1 = 3.2 .pi..(tz / .lambda.), kh2 = 3.2 .pi..(tS / .lambda.) are given in a constant numeric value range (.lambda.; wavelength of seconda ry- mode surface acoustic wave), and a triple harmonics of an excited second-mod e surface acoustic wave is used.