发明名称 |
METHOD FOR REDUCING VARIATIONS IN ARRAYS OF MICRO-MACHINED CANTILEVER STRUCTURES USING ION IMPLANTATION |
摘要 |
A method of adjusting the position of a micro-mechanical bi-material cantilever is provided. The bi-material includes a first and a second material and each material has a corresponding thermal expansion coefficient. The method includes implanting ions predominantly into one material of the bi-material to modify internal stress in one of the first and second materials relative to the other material. The deformation of the bi-material is then detected to modulate the implantation of ions thereto.
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申请公布号 |
WO0136319(A8) |
申请公布日期 |
2001.09.27 |
申请号 |
WO2000US31358 |
申请日期 |
2000.11.15 |
申请人 |
SARNOFF CORPORATION |
发明人 |
VILLANI, THOMAS, STEPHEN;GOODMAN, LAWRENCE, A. |
分类号 |
B81B3/00;B81C1/00;(IPC1-7):B81B3/00;G01J5/40 |
主分类号 |
B81B3/00 |
代理机构 |
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