| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a sputtering target assembly having high joining strength, at the time of laminating a target material and a backing plate material and performing diffusion joining, by increasing the contact area of both materials. SOLUTION: The indentations in the joining face of at least either a target material or a backing plate material are filled with fine powders, the surfaces are made smooth, the contact face at the time of laminating of both materials is widen, and, after that, diffusion joining is performed by heating and pressurizing.
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