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发明名称
MICROFABRICATED TEMPLATE FOR MULTIPLE CHARGED PARTICLE BEAM CALIBRATIONS AND SHIELDED CHARGED PARTICLE BEAM LITHOGRAPHY
摘要
申请公布号
EP1135789(A2)
申请公布日期
2001.09.26
申请号
EP20000929001
申请日期
2000.05.03
申请人
ETEC SYSTEMS, INC.
发明人
LEE, KIM, Y.;KIM, HO-SEOB;MANKOS, MARIAN;MURAY, LAWRENCE;CHANG, T., H., P.
分类号
G03F1/16;G03F7/20;G03F9/00;H01J37/305;H01J37/317;H01L21/027;(IPC1-7):H01J37/317
主分类号
G03F1/16
代理机构
代理人
主权项
地址
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