| 摘要 |
PURPOSE: To provide a pellicle adhesive which ensures stable adhesive strength, does not cause photodegradation and decomposition, does not damage a pellicle membrane and has a long service life and high performance and a pellicle obtained by bonding a pellicle membrane to pellicle frame with the adhesive. CONSTITUTION: A pressure sensitive adhesive is used as a membrane adhesive for a pellicle which bonds a pellicle membrane comprising a fluororesin to a pellicle frame. The pressure sensitive adhesive is preferably a silicone-base adhesive. The material of the pellicle membrane is preferably a polymer of a fluorine-containing monomer having a cyclic perfluoro-ether group. |
