| 摘要 |
PROBLEM TO BE SOLVED: To obtain of a high-quality product by uniformly heating a material to be treated while achieving the quick cooling of the material efficiently. SOLUTION: A plurality of combustion type radiant tube heaters 34 facing the inside of a treating chamber 16 are arranged in a vacuum furnace 10 so as to be placed between heat insulating walls 14 and a material 18 to be treated. Heat transfer plates 36 whose size is set so as to be capable of covering whole of the surface of the material 18, which is opposed to the radiant tube heater 34, are arranged between the radiant tube heaters 34 and the material 18 in the treating chamber 16. Whole of the heat transfer plates 36 is heated by radiation from the radiant tube heaters 34 and whole of the material 18 is heated uniformly by the radiant heat of the heat transfer plates 36. Dampers 40 for regulating and controlling inert gas, which flows into the treating chamber 16, so as to flow toward the side of the material 18 mainly, are arranged at the lower ends of the heat transfer plates 36 so as to be capable of controlling the slanting of the dampers 40.
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