| 摘要 |
PROBLEM TO BE SOLVED: To efficiently illuminate illumination light on a desired observation position without enlargement even when a glass substrate is enlarged. SOLUTION: A lighting system unit 6 integrating a light source 1, a lens 3 for condensing, and a lens 4 for projection is swung by an illumination attitude control means 7 in one direction and an other direction for illuminating the desired observation position on the glass substrate 5 by the illumination light 2.
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