| 摘要 |
PROBLEM TO BE SOLVED: To obtain continuously a particle number distribution on a fixed plane region in a clean room at the same time. SOLUTION: This measuring device is characterized by arranging suction holes 5 of plural suction tubes 2 continuously in a fixed plane region as particle counters 3, 4 for measuring the number of floating particles in the clean room or the like, and connecting detection parts 4 of the particle counters capable of counting the particles to each suction tube respectively.
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