| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating film which has excellent wear resistance, low friction coefficient and excellent sliding characteristics, and to provide a member having the excellent characteristics. SOLUTION: This coating film comprising a diamond-like carbon hard multi- layered film 3 which has an amorphous structure containing carbon as a main component and is obtained by alternately laminating low hardness hard carbon layers 4 containing graphite clusters having an average diameter of >=2 nm and high hardness hard carbon layers 5 containing graphite clusters having an average diameter of <=1 nm. The graphite clusters in the low hardness hard carbon layers 4 each preferably has a shell structure in which the c surface of the graphite is laminated in a spherical shape. It is also preferable that the outermost layer A is formed from the low hardness hard carbon layer in a layer thickness of 2 to 200 nm. The member is formed by laminating the diamond-like carbon hard multi-layered film 3 to a substrate 1 through an intermediate layer 2. |
