APPARATUS FOR STORING AND MOVING A CASSETTE,申请号EP19990962887-传众专利搜索

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发明名称	APPARATUS FOR STORING AND MOVING A CASSETTE
摘要
申请公布号	EP1135793(A2)	申请公布日期	2001.09.26
申请号	EP19990962887	申请日期	1999.11.23
申请人	APPLIED MATERIALS, INC.	发明人	PERLOV, ILYA;GANTVARG, EVGUENI;BELITSKY, VICTOR
分类号	B65G1/00;B65G1/04;B65G49/07;H01L21/00;H01L21/673;H01L21/677;H01L21/687;(IPC1-7):H01L21/00	主分类号	B65G1/00
代理机构		代理人
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