| 摘要 |
PURPOSE: Coating electrodes of a plasma polymerization equipment are provided to improve productivity by supplying a means which can increase discharging initiation voltage during the plasma polymerization, thereby improving polymerization property of materials to be coated during the initial plasma polymerization and preventing carbide from being dropped on the materials to be coated. CONSTITUTION: The coating electrodes of a plasma polymerization equipment are characterized in that a plasma initiation voltage increasing material (7) is coated to a certain thickness on the surface of the electrodes, wherein the electrodes include a mesh shaped electrode (5) as well as a sheet shaped electrode, the materials to be coated comprises titanium (Ti), nickel (Ni), carbon (C) and chromium (Cr), and the thickness of the materials to be coated is within the range of 0.1 to 100 microns, thereby obtaining voltage for stable polymerization from the initial plasma polymerization by increasing plasma initiation voltage due to the pretreated new structure of the electrodes.
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