STRUCTURE OF GAS SPRAY NOZZLE FOR FORMING NITRIDE LAYER OF EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR

摘要

PURPOSE: A structure of a gas spray nozzle for forming a nitride layer is provided to minimize generation of power caused by unreacted residue gas in a process for forming the nitride layer, by simultaneously spraying two kinds of gas through the same spraying hole to make reaction regions coincide with each other. CONSTITUTION: The first gas nozzle sprays the first source gas. The second gas nozzle sprays the second source gas. Spraying holes(105) of the first and second spray nozzles for a reaction for forming a nitride layer coincide with each other so that the first and second source gas is sprayed on a reaction tube through the same spraying hole.