| 摘要 |
PROBLEM TO BE SOLVED: To provide an angular velocity sensor capable of adjusting its sensitivity by easily measuring the sensitivity of angular velocity. SOLUTION: A driving frame 11 and a detecting frame 12 are supported floatingly with respect to a silicon base 10. When angular velocity around a z-axis is applied in the state of the driving frame 11 and detecting frame 12 which is vibratingly driven in an x-direction, the detecting frame 12 vibrates in the y-direction according to the Coriolis force, based on the angular velocity. The y-direction vibration of the detecting frame 12 is detected as a displacement signal, and the applied angular velocity is detected on the basis of the displacement signal. This angular velocity sensor is provided with measuring electrodes 16a, 16b for vibratingly driving the detecting frame 12 upon the input of a drive signal, so as to cause fluctuations in electrostatic attracting force between the detecting frame 12 and the measuring electrodes 16c, 16b. The y-direction resonance frequency and the Q-value of the detecting frame 12 are measured, on the basis of the displacement signal and the drive signal inputted to the measuring electrodes 16a, 16b. |
