发明名称 CHLORINE CONCENTRATION MEASUREMENT DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a chlorine concentration measurement device eliminating a measurement error due to deterioration of a silver/silver chloride electrode for accurately measuring a chlorine concentration. SOLUTION: This chlorine concentration measurement device measuring a concentration of chlorine included in a plating solution is provided with a measurement cell 1 storing the plating solution, a counter electrode 2 arranged inside the measurement cell 1, a working electrode 3 arranged inside the measurement cell 1, a reference electrode 4 arranged inside the measurement cell 1, a power source 5 feeding electric current between the working electrode 3 and the counter electrode 2 so that the potential of the working electrode 3 to the reference electrode 4 becomes a predetermined potential, and a control unit 6 finding a chlorine concentration of the plating solution on the basis of the current value of the electric current flowing between the working electrode 3 and the counter electrode 2.
申请公布号 JP2001264290(A) 申请公布日期 2001.09.26
申请号 JP20000080144 申请日期 2000.03.22
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 ICHIEDA NOBUYUKI;TANAKA TETSUO;MIZOHATA YASUHIRO
分类号 G01N27/26;C25D21/12;G01N27/416;G01N27/447 主分类号 G01N27/26
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