DIAPHRAGM, DIAPHRAGM PUMP AND METHOD OF MANUFACTURING DIAPHRAGM

摘要

PROBLEM TO BE SOLVED: To provide a small-sized diaphragm pump of a large flow the and pressure. SOLUTION: This diaphragm 10 is provided by forming thin film like electrode parts 12 at the upper and lower faces of a thin film part 11 formed of an electrostrictive polymer drawn by dielectric polarization, by a physical vaporization method such as sputtering. At this time, the electrode parts 12 are formed smaller than the thin film part 11 to provide the peripheral edge area of the thin film part 11 with a fixed area 14 without the electrode parts 12 formed. The diaphragm 10 is placed on the upper face of a easing 1 formed with an exhaust passage 2 and an intake passage 3, and while applying tension to the diaphragm 10, the fixed area 14 is jointed to the side face of the easing 1 to provide the diaphragm pump A.