| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning mirror in which a wiring passing through spring parts receiving repeated deformation is hardly disconnected with little power consumption. SOLUTION: The main structure body of the scanning mirror is provided with a movable part 102, a pair of spring parts 104a and 104b for supporting the movable part so as to be rockable and a frame part 106 to which these parts are fixed. The movable part 102 is provided with a driving coil 112 and a detecting coil 122, which consist of aluminum wiring, for example on the front surface. Both ends of the driving coil 112 are connected to a pair of aluminum wiring 116 arranged in the frame part 106 via a pair of wirings 114 extending in the spring part 104a. Both ends of the detecting coil 122 are connected to a pair of aluminum wirings 126 arranged in the frame part 106 via a pair of wirings 124 extending in the spring part 104b. The wirings 114 and 126 each consist of a TiSi layer with about 2μm thickness, for example.
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