| 摘要 |
PROBLEM TO BE SOLVED: To obtain a ceramic-coated quartz glass body having neither peeling nor damage of a ceramic layer even if repeatedly subjected to thermal shocks being controlled in dust, etc., having excellent chemical resistance and excellent handleability. SOLUTION: This ceramic-coated quartz glass body is obtained by coating the surface of a porous quartz glass body 3 or the surface a porous quartz glass layer formed on a quartz glass body with ceramic layers 1 and 2. The ceramic-coated quartz glass body is produced by forming a ceramic layer on the surface of the porous quartz glass body or the porous quartz glass layer by a chemical vapor-phase growth reaction, then taking out the porous quartz glass from a furnace and cleaning the ceramic layer with an acid.
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