PLASMA DISPLAY PANEL WITH FERROELECTRIC THIN FILM AND DEPOSITION METHOD FOR FERROELECTRIC THIN FILM

摘要

PURPOSE: A PDP and deposition method for ferroelectric thin film is provided to reduce power consumption and improve luminance, while lengthening lifespan of the discharge cell. CONSTITUTION: A PDP comprises a front glass(16a) and a rear glass forming a substrate; an electrode unit constituted by an electrode(10) and a bus electrode(24) and which is formed at a surface of the front glass; a ferroelectric thin film(30) deposited onto the front glass where the electrode unit is formed; and discharge cells constituted by a protective film(14) deposited onto the ferroelectric thin film and separated from each other by a barrier. A method comprises the first step of mounting a substrate to a substrate holder and maintaining a reaction chamber at a high vacuum state; the second step of raising the temperature of the substrate to a level suitable for thin film deposition, and rotating the substrate at a predetermined speed; the third step of making the precursor solution into mist state by using ultrasonic wave, and carrying the precursor solution into the reaction chamber by using inert carrier gas; and the fourth step of depositing a ferroelectric thin film onto the substrate by injecting reactive gas for fabricating oxide thin film, into the reaction chamber.