| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure control unit capable of keeping the inside of a gas supplying path in a clean state, and decreasing the consumption of high- purity gas and the like required for purifying the inside of the gas supplying path when connected with a high pressure gas vessel, in case of reducing the pressure of the high-purity gas and the like to a target pressure and supplying that to various analysis meters and the like from the high pressure gas vessel through a pressure regulator, and to provide a clean gas supplying method using the pressure control unit. SOLUTION: In an inlet side of a primary pressure regulator 10 connected to a gas vessel 5 through a coupling pipe 4, an air blocking/discharging valve 1 having two functions as a air blocking valve 2 and an air discharging valve 3 is installed, and an outlet valve 7 is installed in an outlet side. The high-purity gas and the like is sealed in a gas supplying space from the air blocking/ discharging valve 1 to the outlet valve 7.
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