| 摘要 |
PROBLEM TO BE SOLVED: To provide a system to be efficiently and economically assembled in a state that a cooling system for a semiconductor factory is matched with a building. SOLUTION: In a clean room being of three-layer structure comprising a main clean room, a return space combined with utility being the lower part of the main clean room, and a plenum chamber being the upper part of the main clean room, cooling coils are installed at the return space combined with the utility and the plenum chamber. |
