| 摘要 |
PURPOSE: A reactive gas injection control method is provided to achieve an efficient plasma discharge by maximizing use efficiency of the reactive gas introduced into the polymerization chamber and the electric potential difference between anode and cathode. CONSTITUTION: A method is characterized in that the reactive gas injection into a polymerization chamber is performed in an intermittent manner so as to use most of the reactive gas injected into the polymerization chamber, for the polymerization process. The reactive gas injection time depends on the surface processing speed using plasma. An electrode for polymerization apparatus is constituted by a thin plate having a plurality of holes which are formed in a regular manner. The electrode has electrode holding portions formed at both ends of the electrode.
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