发明名称 |
Mercury process gold ballbond removal apparatus |
摘要 |
A method and apparatus for reducing the risk of environmental contamination from mercury spillage during carry over between processing tanks during the gold ball bond removal process by providing a self-contained, compact, environmentally safe system for use with toxic chemicals and liquids. The present invention provides a self-contained, integrally molded enclosure upper and lower chambers separated by a partition. The partition has a plurality of stations integrally formed therein, each of which is capable of containing a chemical liquid. The method comprises dipping a slide containing the semiconductor chip first into a toxic liquid, then into a first decontamination station and finally into a second decontamination station.
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申请公布号 |
US6294028(B1) |
申请公布日期 |
2001.09.25 |
申请号 |
US19990298690 |
申请日期 |
1999.04.23 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BELL PAUL D.;BOMBERGER GLENN L.;BROUILLETTE ALLEN W.;MCMULLIN TODD;WASIELEWSKI RICHARD W. |
分类号 |
C22B11/02;C22B11/10;C22B43/00;G01R3/00;(IPC1-7):C23G1/02 |
主分类号 |
C22B11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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