,申请号JP19910318687-传众专利搜索

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发明名称
摘要
申请公布号	JP3211302(B2)	申请公布日期	2001.09.25
申请号	JP19910318687	申请日期	1991.11.07
申请人		发明人
分类号	C23C16/34;H01L21/318;H01L21/336;H01L29/786;(IPC1-7):H01L21/318	主分类号	C23C16/34
代理机构		代理人
主权项
地址

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