发明名称 FLUID TREATMENT APPARATUS
摘要 PROBLEM TO BE SOLVED: To enhance the treatment capacity of a fluid by controlling the ejection and discharge of the fluid and the atmosphere of a treatment region in an apparatus for treating a sample by the ejection of the fluid. SOLUTION: This fluid treatment apparatus is constituted of two or more treatment fluid jet nozzles for ejecting treatment fluids to almost one point on a sample from different directions, the discharge port of the treated fluid provided above the treatment region and a mechanism for supplying the fluid for separating the fluid treatment region on the sample from the outside of the treatment region.
申请公布号 JP2001259552(A) 申请公布日期 2001.09.25
申请号 JP20000077762 申请日期 2000.03.15
申请人 HITACHI LTD 发明人 SATO TAKAO
分类号 B08B5/02;B08B3/02;C23F1/08;C23G3/00;H01L21/302;H01L21/304;H01L21/306;(IPC1-7):B08B5/02 主分类号 B08B5/02
代理机构 代理人
主权项
地址