METHOD FOR CLEANING HIGH PURITY ALKALINE CHEMICAL LIQUID HANDLING EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a cleaning method for rapidly removing a contaminant due to a matal component in high purity alkaline chemical liquid handling equipment such as a container, of which at least the inner surface is constituted of a resin, at a high level. SOLUTION: Primary cleaning using a hydrochloric acid aqueous solution and/or a nitric acid aqueous solution is applied to the interior of the high purity alkaline chemical liquid handling equipment and secondary cleaning using both solutions is applied thereto.