| 摘要 |
PROBLEM TO BE SOLVED: To reduce manufacturing costs while maintaining an ink discharge efficiency of an ink jet head by preventing a metallic substrate 1 from being corroded by an etching solution when a piezoelectric element film 2 is patterned even if the piezoelectric element film is patterned after joined to the metallic substrate 1. SOLUTION: The metallic substrate 1 is coated with a chemical resistant coating agent, whereby a coat layer 1b is formed to an upper face, a lower face and holes 1a for pressure chambers of the metallic substrate 1. Thereafter at least one piezoelectric element film 2 is joined to the metallic substrate 1 and patterned. Moreover, the joining of the piezoelectric element film 2 to the metallic substrate 1 is carried out when the coating agent coated to the metallic substrate 1 is set.
|
