发明名称 |
Integrated thin-film solar battery |
摘要 |
A sputtering-deposition method usable in forming on an insulator substrate a film including a conductive layer includes the steps of: preparing a conductive substrate holder in the form of a frame having an opening at its central area and electrically grounded; positioning the insulator substrate to cover the opening of the holder; arranging a flexible spacer on a peripheral edge of the substrate and also superposing a back plate on the spacer to press the substrate against the holder via the spacer; pressing and fixing the back plate to the holder; and then sputtering a separately provided target to deposit a new layer on a region of the substrate exposed in the holder's opening.
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申请公布号 |
US6294722(B1) |
申请公布日期 |
2001.09.25 |
申请号 |
US20000510842 |
申请日期 |
2000.02.23 |
申请人 |
KANEKA CORPORATION |
发明人 |
KONDO MASATAKA;SUZUKI TAKAYUKI |
分类号 |
H01L27/142;H01L31/048;H01L31/052;H01L31/18;(IPC1-7):H01L31/042 |
主分类号 |
H01L27/142 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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