METHOD FOR MANUFACTURING LIQUID DROP DISCHARGE HEAD

摘要

PROBLEM TO BE SOLVED: To highly accurately form a thickness of a diaphragm at low costs. SOLUTION: A high concentration boron diffuse layer 21 of a depth corresponding to the thickness of the diaphragm 10 is formed to one face of a silicon substrate 20. The silicon substrate is etched from the other face by a potassium hydroxide aqueous solution having an IPA added thereto.