发明名称 GAS INJECTING DEVICE AND METHOD FOR ADJUSTING GAS INJECTING DIRECTION
摘要 PROBLEM TO BE SOLVED: To provide a gas injecting device which can be improved in productive efficiency by omitting the supplementary work which has been required in the conventional example, and a method for adjusting the gas injecting direction of the device. SOLUTION: This gas injecting device is provided with a nozzle section 2 having a nozzle 2b for injecting a gas in its front end section and a spheric section 2a composed of a nozzle nut section 2d and a spherical base-side end section 2c in its base-side end section. This device is also provided with a nozzle case 1 which supports the spheric section 2a in such a way that the outward gas injecting direction of the section 2a can be adjusted. The spheric base-side end section 2c and nozzle nut section 2d are separated from each other in the lengthwise direction when either one of the nozzle 2b and nozzle nut section 2d is rotated around the lengthwise direction. Since the nozzle section 2 can be fixed from the nozzle 2b side after the section 2 is adjusted for the gas injecting direction, the adjustment of the section 2 for the gas injecting direction can be simplified by omitting the supplementary work which has been required in the conventional example.
申请公布号 JP2001257165(A) 申请公布日期 2001.09.21
申请号 JP20000067595 申请日期 2000.03.10
申请人 SHARP CORP 发明人 IMANAKA YASUO;HARADA HIROMITSU;FUJITA MITSUHIRO;MIYAKI YUKIO
分类号 B05B1/26;C23C16/44;C23C16/455;C30B25/14;H01L21/205;(IPC1-7):H01L21/205 主分类号 B05B1/26
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