| 摘要 |
PROBLEM TO BE SOLVED: To reduce width of an occupation space at the end of a sample holder and combine function of inclining three axes, X-, Y- and Z-axes. SOLUTION: The sample holder 1 has an end provided with a spherical body 5, a sample holding bar 6 fixed through the center of the spherical body 5, a rotary inner cylinder 3 having a spherical seat for holding the spherical body 5 and a inclining rod 4 for performing inclining operation of the spherical body 5, the end being inserted in a space of an electron lens 11 of an electron microscope. The sample 7 is held on the sample holding bar 6 at the side of an electron beam 12. A slope at the end of the inclining rod 4 is pushed against one end of the sample holding bar 6 for operating the inclination of the Z-axis and the Y-axis, and the inclining rod 4 is made to escape and pushed thereagainst again up to a preset inclination with the rotation of the slope in a preset inclining direction to change the direction of inclination. Thus, the inclination of the Z-axis and the Y-axis is operated by rotating the spherical body in any direction and at any angle, achieving three-dimensional inclination in a small space.
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