发明名称 METHOD OF MANUFACTURING A PIEZOELECTRIC ACTUATOR
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric actuator which assures higher manufacturing efficiency and is ready for reduction in size of the piezoelectric actuator and thereby to assure easier packing of piezoelectric actuator and also easier quality inspection for delivery. SOLUTION: A plurality of piezoelectric actuators are manufactured by building various member sheets other than the piezoelectric body of the piezoelectric actuator into the piezoelectric material sheet, in such a size for generating a plurality of piezoelectric actuator in order to form a plurality of piezoelectric actuators, and dividing the piezoelectric material sheet after forming the piezoelectric material sheet in the predetermined polarization structure. Moreover, the division of the piezoelectric material sheet may be done at the place where the piezoelectric actuator is used.
申请公布号 JP2001258280(A) 申请公布日期 2001.09.21
申请号 JP20000067478 申请日期 2000.03.10
申请人 SEIKO INSTRUMENTS INC 发明人 SUZUKI MAKOTO;IINO AKIHIRO;KASUGA MASAO;KOROISHI KEITARO
分类号 H01L41/09;H01L41/22;H01L41/338;H02N2/00 主分类号 H01L41/09
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