| 摘要 |
PROBLEM TO BE SOLVED: To measure the vibration of a measuring object without being prem ised on preliminary measurement and with accuracy not restricted by the size of vibration wavelength. SOLUTION: This device is equipped with a beat wave detecting process S3 for self-mixing return light received in a return light receiving process S2 with outgoing light and detecting a beat wave produced by the self-mixing, a differentiating process S4 for differentiating the beat wave, a needle portion extracting process S5 for extracting a needle portion with a steep slope from a differential waveform obtained by the differentiation in the process S4, a needle position machining process S6 for removing the needle portion extracted in the process S5 and machining the needle position in the differential waveform originally occupied by the needle portion, and a vibration information outputting process S7 for outputting vibration information based on the machined differential waveform machined in the process S6.
|
