| 摘要 |
PROBLEM TO BE SOLVED: To provide a cryopump 10 to decrease the generation of a radiation heat to chevron baffle 220 and reduce an equipment cost and a maintenance cost mainly through simple constitution. SOLUTION: A cryopump is provided with a chevron baffle 220, an activated carbon panel 240, and a shield container 230 to contain the chevron baffle 220 and the activated carbon panel 240 and comprises a cryopanel 210 incorporated in a vacuum vessel 300, a first refrigerator 260A to cool an activated carbon panel 210, and a second refrigerator 260B to cooled the chevron baffle 220. A shield plate 20 to shield a radiation heat radiated from an inner wall surface 300a of the vacuum vessel 300 is arranged between the chevron baffle 220 and the inner wall surface 300a of the vacuum tank 300, and a small helium refrigerator is used as the second refrigerator 260B.
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