发明名称 JET OUTLET FOR ELECTROSTATIC COUNTERMEASURE
摘要 PROBLEM TO BE SOLVED: To provide a jet outlet for electrostatic countermeasure that is easy to install and that does not necessitate to make the surrounding area of installation an intercepting structure and that eliminates generation of ozone, electromagnetic noise and dust. SOLUTION: At the upstream side of a cylindrical or prism crack shape formed jet outlet 1, a chamber 2 and a duct 3 are connected and an intercepting portion 4 is provided in the vicinity of the outlet portion of the jet outlet 1. And an ion generating device 10 is provided in the vicinity of the jet outlet 1, and this ion generating device 10 is composed of an ionization source 11 disposed perpendicularly to the direction of flowing of ion transferring gas and a control device 12 which controls the generating amount of ion by the ionization source 11. And the radiant rays such as soft X-rays and the like generating from the ionization source is irradiated to the ion transferring gas in the jet outlet 1 and changed to ion and the generated plus and minus ion are supplied to the desired charged body.
申请公布号 JP2001257096(A) 申请公布日期 2001.09.21
申请号 JP20000066680 申请日期 2000.03.10
申请人 TECHNO RYOWA LTD;HAMAMATSU PHOTONICS KK;HARADA SANGYO KK 发明人 MIZUNO AKIRA;SUGITA AKIO;SUZUKI MASANORI;IZUMI TAKAHARU;ISHIKAWA MASAYOSHI;MINE HARUYUKI
分类号 F24F7/00;F24F7/06;H01L21/02;H05F3/06;(IPC1-7):H05F3/06 主分类号 F24F7/00
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