CERAMIC SUBSTRATE FOR SEMICONDUCTOR MANUFACTURING AND CHECKING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a ceramic substrate for a semiconductor manufacturing and checking device which hardly generates degradation caused by oxidation and has no dropout of a conductor wire or no variation of a resistance value even if used at a high temperature of >=200 deg.C. SOLUTION: A conductor made of one or two circuit(s) is formed on a surface or inside a ceramic substrate for a semiconductor manufacturing and checking device. The ceramic substrate for a semiconductor manufacturing and checking device has features of the conductor being electrically connected with a conductor wire and a part at least of the connecting portion and the conductor wire being covered with non-oxide metal.