| 摘要 |
PROBLEM TO BE SOLVED: To provide an aligner, an exposing method, and a method of manufacturing a semiconductor device by which a man power or a mistake associated with the changing work of parameter can be reduced. SOLUTION: A parameter of a main storage part 20 is stored in a sub storage part 23 at a predetermined point, the parameter of the main storage part 20 is compared with that of the sub storage part 23 by a parameter control system 24, and the comparison result is outputted.
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