| 摘要 |
PROBLEM TO BE SOLVED: To surely supply a development processing liquid of the necessary for a development processing tank. SOLUTION: A system for replenishing the development processing tank with the development processing liquid is provided with a pump P having a diaphragm 14 activated back and forth by supply of the intermittent electric power to an electromagnetic solenoid S and is provided with a controller for setting the duty ratio of the intermittent electric power at a value at which the diaphragm 14 is surely activated to an operating end and adjusting the supply rate of the development processing liquid by changing the period of the intermittent electric power.
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