| 摘要 |
PROBLEM TO BE SOLVED: To provide a system and method for testing electrification, capable of evaluating the temperature dependence of electrification characteristic and capable of performing the measurement of exposure and potential. SOLUTION: The electrification testing system 10 is equipped with a reciprocally movable truck type moving stage 12, a charger 14, a charge neutralizer 16 and an exposure/potential measuring instrument 18. An object to be measured is housed in the recessed part 22 of the moving stage 12. A heater 24 for heating the object to be measured is embedded in the bottom of the recessed part 22 and the electric wiring of the heater 24 is appropriately drawn out to be connected to the external power supply on a machine side. The exposure/potential measuring instrument 18 is integrally constituted of an exposure part 26 and a potential measuring part (potential change measuring part) 28. As the measuring probe of the potential measuring part 28, a NESA electrode 28a is used. The light from the light source part 26b of the exposure part 26 transmits through the NESA glass electrode 28a to irradiate the object to be measured to expose the same to this light and, in parallel to the exposure of the object to be measured, the potential of the object to be measured is measured by the potential measuring part 28.
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