| 摘要 |
PROBLEM TO BE SOLVED: To provide an extremely thin contact sensor possible of being arranged in an extremely narrow space. SOLUTION: This contact sensor is characterized by having a projection part provided in a thin plate comprising a semiconductor, an opening part provided in the thin plate comprising the semiconductor in the circumferential part of the projection, and a strain sensor provided adjacent to the projection and detecting a force exerted on the projection by the strain of the thin plate comprising the semiconductor.
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