PROCESS CONTROL DEVICE AND PROCESS CONTROL METHOD

摘要

PROBLEM TO BE SOLVED: To provide a process control device and a process control method which can keep a high productivity and improve characteristics in a processing step in which a processing part provided with a plurality of process devices performs a processing operation two times or more. SOLUTION: This process control device is provided with a device group information storage means in which both a first processing step and a following second processing step perform a processing step to be processed in the same working process and an information concerning the gorup division of a plurality of processing devices, and a device group selection means which selects the device group so that the processing device in the device group of the processing device for the first processing step may perform a processing operation in the second processing step.